|
name |
electronic gas |
|
|
molecular formula |
|
|
alias name |
|
|
application |
it could fall into the following three categories: pure gas, high purity gas and semi-conductor gas for special materials. special material gas is used for extension, mixture and etching techniques; high purity gas is mainly used diluting and transferring. electronic gas is one of the important branches of specialty gases. based on its purity and usage, electronic gas could be divided as electronic level, lsi (large scale integrated circuit), vlsi (very large scale integrated circuits) and ulsi (extra large scale integrated circuits). |
|
character |
|
|
production methods |
| |
|
|
